DocumentCode
2608032
Title
Self-assembled growth on flexible alumina and nanoporous silicon templates
Author
Garre, K. ; Cahay, M. ; Kosel, P.B. ; Fraser, J.W. ; Lockwood, D.J. ; Semet, V. ; Binh, Vu Thien ; Kanchibhotla, B. ; Bandyopadhyay, S. ; Das, B.
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Cincinnati, Cincinnati, OH
fYear
2007
fDate
2-5 Aug. 2007
Firstpage
1227
Lastpage
1230
Abstract
Several nanoscale arrays of metallic, semiconductor, and organic carbon compounds (carbon nanopearls) have been fabricated on nanoporous flexible alumina and silicon templates based on a new self-assembly growth mode. They were obtained using pulsed laser deposition, thermal evaporation, e-beam evaporation, or RF magnetron sputtering. The different moieties that were observed include nanodomes and nanodots (gold, nickel, cobalt, and aluminum nitride), nanonecklaces (carbon nanopearl), and nanopinetrees (gold) self assembled on flexible alumina templates. A nanoneedle array was also self assembled by e-beam evaporation of nickel on silicon substrates that were rendered nanoporous by the use of a porous alumina mask. The physical processes underpinning the new self assembly growth mode have been studied based on extensive characterization of the templates prior to and after deposition of the various metallic, semiconductor, and organic compounds. These include atomic force microscopy (AFM), X-ray diffraction (XRD) analysis, Raman spectroscopy and field emission-scanning electron microscopy (FE-SEM). Some of the arrays have been tested as potential candidates for new cold cathode arrays for vacuum electronic applications using the scanning electron field emission microscopy (SAFEM) technique.
Keywords
III-V semiconductors; Raman spectra; X-ray diffraction; alumina; aluminium compounds; arrays; atomic force microscopy; carbon; cobalt; evaporation; field emission electron microscopy; gold; nanoporous materials; nickel; organic compounds; pulsed laser deposition; scanning electron microscopy; self-assembly; semiconductor growth; semiconductor quantum dots; silicon; sputter deposition; vacuum microelectronics; wide band gap semiconductors; Al2O3; AlN; C; Co; Ni; RF magnetron sputtering; Raman spectroscopy; Si; X-ray diffraction analysis; atomic force microscopy; carbon nanopearls; cold cathode arrays; e-beam evaporation; field emission-scanning electron microscopy; flexible alumina; nanodomes; nanodots; nanonecklaces; nanoneedle array; nanopinetrees; nanoporous silicon templates; organic carbon compounds; pulsed laser deposition; self-assembled growth; thermal evaporation; vacuum electronic applications; Atomic force microscopy; Carbon compounds; Electron microscopy; Gold; Nanoporous materials; Nickel; Pulsed laser deposition; Self-assembly; Semiconductor laser arrays; Silicon; Self assembly; alumina templates; cold cathodes; nanodomes; nanodots; nanoporous silicon substrates; vacuum microelectronics;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on
Conference_Location
Hong Kong
Print_ISBN
978-1-4244-0607-4
Electronic_ISBN
978-1-4244-0608-1
Type
conf
DOI
10.1109/NANO.2007.4601404
Filename
4601404
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