SEM Techniques for the Analysis of Memory Circuits

Author

Beall, J.R. ; Wilson, D.D. ; Echols, W.E. ; Walter, N. J J

Author_Institution

MARTIN MAIETTA CORPORATION, P. O. BOX 179, DENVER, COLORADO 80201, (3C3) 977-3838

fYear

1980

fDate

29312

Firstpage

Lastpage

Keywords

Circuit analysis; Circuit testing; Electron beams; Etching; Glass; Logic circuits; Logic testing; Scanning electron microscopy; Silicon; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium, 1980. 18th Annual

Conference_Location

Las Vegas, NV, USA

ISSN

0735-0791

Type

DOI

10.1109/IRPS.1980.362914

Filename

4208310

Link To Document