• DocumentCode
    2610120
  • Title

    Corrosion of Aluminum IC Metaillization with Defective Surface Passivation Layer

  • Author

    Comizzoli, R.B. ; White, L.K. ; Kern, W. ; Schnable, G.L. ; Peters, D.A. ; Tracy, C.E. ; Vibronek, R.D.

  • Author_Institution
    Solid State Technology Center, RCA Laboratories, Somerville, N.J. 08876.
  • fYear
    1980
  • fDate
    29312
  • Firstpage
    282
  • Lastpage
    292
  • Abstract
    Corrosion rates and corrosion current of aluminum line patterns passivated with PSG and silicon nitride were measured. Relationships between corrosion and various parameters including temperature, relative humidity, aluminum deposition method, alloying treatment, passivation layer type and defect density and contaminants are reported. A surface treatment which lowers corrosion currents is also discussed.
  • Keywords
    Aluminum; Corrosion; Current measurement; Humidity; Passivation; Pollution measurement; Silicon; Surface contamination; Surface treatment; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1980. 18th Annual
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1980.362955
  • Filename
    4208351
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2610120