• DocumentCode
    2610250
  • Title

    Electro-epitaxial growth of thin film silicon

  • Author

    Cunningham, Douglas W. ; Mauk, Michael ; Curran, James ; Barnett, Allen

  • Author_Institution
    AstroPower Inc., Newark, DE, USA
  • fYear
    1990
  • fDate
    21-25 May 1990
  • Firstpage
    307
  • Abstract
    Epitaxial growth of silicon from a liquid-metal solution with growth driven by the passage of current through the solvent has been achieved. The actions of the current is not to produce a faradaic electrochemical reaction but to enhance mass transport to the seed for the solvated silicon atoms. Planar devices have been grown using a temperature step with electric current and using electric current alone. A 15 μm thick film was grown using 20 A cm2 for 30 min with no step. Overgrowth on silicon dioxide produced continuous films close to 1 cm2. Characterization of the electroepitaxy solar cells have shown open-circuit voltages of 529 mV and short-circuit current densities of 14 mA cm2 with no antireflection coating
  • Keywords
    elemental semiconductors; liquid phase epitaxial growth; semiconductor thin films; silicon; solar cells; 15 micron; 529 mV; electro-epitaxial growth; liquid-metal solution; mass transport; open-circuit voltages; semiconductor; short-circuit current densities; solar cells; solvated silicon atoms; temperature step; thin film Si; Atomic layer deposition; Atomic measurements; Current; Epitaxial growth; Semiconductor films; Semiconductor thin films; Silicon compounds; Solvents; Temperature; Thick films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialists Conference, 1990., Conference Record of the Twenty First IEEE
  • Conference_Location
    Kissimmee, FL
  • Type

    conf

  • DOI
    10.1109/PVSC.1990.111637
  • Filename
    111637