• DocumentCode
    2611616
  • Title

    Degradation of Thin-Gate Mosfet´s under High Electric Field Stress

  • Author

    Ishiuchi, H. ; Matsumoto, Y. ; Mochizuki, T. ; Sawada, S. ; Ozawa, O.

  • Author_Institution
    Toshiba Corporation, Semiconductor Device Engineering Laboratory, 72, Horikawa-cho, Saiwai-ku, Kawasaki, Japan, 210
  • fYear
    1982
  • fDate
    30011
  • Firstpage
    228
  • Lastpage
    232
  • Abstract
    A new type of instability of threshold voltage and transconductance in MOSFET´s under high electric field stress (¿. 7 MV/cm) across the gate oxide is reported. A quantitative model which explains the physical mechanism of these phenomena, and also predicts the intrinsic limitation of the thin gate oxide device is also proposed.
  • Keywords
    Current measurement; Degradation; Electrons; MOS capacitors; MOSFET circuits; Stress; Substrates; Testing; Threshold voltage; Transconductance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1982. 20th Annual
  • Conference_Location
    San Diego, NV, USa
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1982.361933
  • Filename
    4208451