DocumentCode
2618438
Title
2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406)
fYear
2000
fDate
14-15 June 2000
Abstract
The following topics were dealt with. Technology strategy, production planning, yield enhancement and cycle time improvement, CIM system and process control
Keywords
computer aided production planning; computer integrated manufacturing; integrated circuit yield; process control; strategic planning; CIM system; cycle time improvement; process control; production planning; technology strategy; yield enhancement;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing Technology Workshop, 2000
Conference_Location
Hsinchu, Taiwan
Print_ISBN
0-7803-6374-4
Type
conf
DOI
10.1109/SMTW.2000.883084
Filename
883084
Link To Document