Patch antenna on micromachined silicon

Author

Hasch, Juergen ; Schollhorn, Claus ; Kasper, Erich

Author_Institution

Central Res. & Dev., Robert Bosch GmbH, Stuttgart, Germany

fYear

2004

fDate

8-10 Sept. 2004

Firstpage

29

Lastpage

32

Abstract

A rectangular microstrip patch antenna, realized as a silicon based monolithic millimeter-wave integrated circuit (SIMMWIC), is presented. The antenna was designed for an operating frequency of 122 GHz and manufactured on micromachined high resistivity silicon-on-insulator (SOI) substrate. Since direct measurements of the far field pattern of an integrated antenna element are difficult at this frequency, a scaled version of the antenna (with a resonant frequency of about 9.6 GHz) was also manufactured. Far field measurements were performed, to determine the antenna performance and compare with numerical results.

Keywords

MIMIC; antenna radiation patterns; micromachining; microstrip antennas; silicon; silicon-on-insulator; substrates; 122 GHz; MIMIC; SOI substrate; Si; far field pattern; micromachined silicon; monolithic millimeter-wave integrated circuit; rectangular microstrip patch antenna; silicon-on-insulator substrate; Antenna measurements; Conductivity; Frequency measurement; Integrated circuit measurements; Manufacturing; Microstrip antennas; Millimeter wave integrated circuits; Patch antennas; Resonant frequency; Silicon on insulator technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Silicon Monolithic Integrated Circuits in RF Systems, 2004. Digest of Papers. 2004 Topical Meeting on

Print_ISBN

0-7803-8703-1

Type

conf

DOI

10.1109/SMIC.2004.1398159

Filename

1398159