DocumentCode
2623012
Title
Modeling and Simulation for a Vibratory Tuning-fork MEMS Gyroscope
Author
Yongpeng, Wen ; Huilin, Shang
Author_Institution
Coll. of Urban Railway Transp., Shanghai Univ. of Eng. Sci., Shanghai, China
Volume
2
fYear
2011
fDate
6-7 Jan. 2011
Firstpage
605
Lastpage
608
Abstract
A vibratory tuning-fork MEMS gyroscope is presented in the study. Design concepts for the gyroscope are obtained by introducing the working principle, the suspension system, and the damping. The dynamical simulation is applied to indicate that this gyroscope has achieved high stability and sensitivity by the indirect connection structure and slide-film damping in the drive and sense directions. It is found that the novel structural design for the gyroscope can be seemed as a good approach to increase the performance of tuning-fork gyroscope.
Keywords
damping; gyroscopes; micromechanical devices; damping; indirect connection structure; slide-film damping; suspension system; vibratory tuning-fork MEMS gyroscope; Capacitance; Damping; Electrodes; Gyroscopes; Micromechanical devices; Suspensions; Vibrations; Damping; Gyroscope; Indirect connection structure; MEMS; Slide-film; Tuning-fork;
fLanguage
English
Publisher
ieee
Conference_Titel
Measuring Technology and Mechatronics Automation (ICMTMA), 2011 Third International Conference on
Conference_Location
Shangshai
Print_ISBN
978-1-4244-9010-3
Type
conf
DOI
10.1109/ICMTMA.2011.437
Filename
5721255
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