DocumentCode
2623446
Title
Reliability investigation on a fully suspended redundancy ring
Author
Flourens, F. ; Peyrou, D. ; Yacine, K. ; Melle, S. ; Grenier, K. ; Dubuc, D. ; Boukabache, A. ; Pons, P. ; Plana, R.
Author_Institution
LAAS-CNRS, Toulouse, France
fYear
2004
fDate
8-10 Sept. 2004
Firstpage
163
Lastpage
166
Abstract
This paper reports on the reliability investigation on a suspended redundancy ring for millimeter wave applications. Mechanical characterization has shown no major failure when an original method is presented to investigate the charging effect in a capacitive MEMS.
Keywords
microswitches; millimetre wave devices; redundancy; capacitive MEMS; charging effect; fully suspended redundancy ring; millimeter wave applications; reliability; Biomembranes; Bridge circuits; Dielectric substrates; Fabrication; Gold; Micromachining; Microswitches; Radiofrequency microelectromechanical systems; Redundancy; Space technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Silicon Monolithic Integrated Circuits in RF Systems, 2004. Digest of Papers. 2004 Topical Meeting on
Print_ISBN
0-7803-8703-1
Type
conf
DOI
10.1109/SMIC.2004.1398193
Filename
1398193
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