• DocumentCode
    2624312
  • Title

    P-stop designs for reducing electric field strength at implant edges

  • Author

    Unno, Y. ; Ikegami, Y. ; Kohriki, T. ; Terada, S. ; Hara, Kentaro ; Yamamura, K. ; Kamada, S.

  • Author_Institution
    IPNS, High Energy Accelerator Research Organization, KEK, Tsukuba, Ibaraki 305-0801, Japan
  • fYear
    2008
  • fDate
    19-25 Oct. 2008
  • Firstpage
    2507
  • Lastpage
    2512
  • Abstract
    In designing the radiation-tolerant silicon microstrip sensors, the onset of microdischarge must e expelled above the maximum operation voltage. The difficulty is enhanced in the n-in-p sensors, with the existence of p-n junction in the n-strips and the existence of p-stop structures. The device simulation program enabled to understand the electric fields in detail and to optimize the design to be robust against the microdischarge. The potential of the p-stop is the fundamental. In the common p-stop structures, the narrowest p-stop width has the shallowest potential and generating the least electric field strength (Emax). The potential of the split p-stops near to the n-implant in the combined p-stop does not have a potential closer to that of the n-implant. The symmetric location of p-stop has the least Emax. The Emax increases as the strip pitch decreases less than 80 microns but stays the same as the pitch widens larger than 80 microns. The onset voltage of Punch-thru protection (PTP) is governed by the gap between the n-implants, N-N gap, even with the existence of p-stop in between.
  • Keywords
    Design optimization; Implants; Large Hadron Collider; Microstrip; Nuclear and plasma sciences; P-n junctions; Robustness; Silicon; Strips; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nuclear Science Symposium Conference Record, 2008. NSS '08. IEEE
  • Conference_Location
    Dresden, Germany
  • ISSN
    1095-7863
  • Print_ISBN
    978-1-4244-2714-7
  • Electronic_ISBN
    1095-7863
  • Type

    conf

  • DOI
    10.1109/NSSMIC.2008.4774864
  • Filename
    4774864