DocumentCode
2624312
Title
P-stop designs for reducing electric field strength at implant edges
Author
Unno, Y. ; Ikegami, Y. ; Kohriki, T. ; Terada, S. ; Hara, Kentaro ; Yamamura, K. ; Kamada, S.
Author_Institution
IPNS, High Energy Accelerator Research Organization, KEK, Tsukuba, Ibaraki 305-0801, Japan
fYear
2008
fDate
19-25 Oct. 2008
Firstpage
2507
Lastpage
2512
Abstract
In designing the radiation-tolerant silicon microstrip sensors, the onset of microdischarge must e expelled above the maximum operation voltage. The difficulty is enhanced in the n-in-p sensors, with the existence of p-n junction in the n-strips and the existence of p-stop structures. The device simulation program enabled to understand the electric fields in detail and to optimize the design to be robust against the microdischarge. The potential of the p-stop is the fundamental. In the common p-stop structures, the narrowest p-stop width has the shallowest potential and generating the least electric field strength (Emax). The potential of the split p-stops near to the n-implant in the combined p-stop does not have a potential closer to that of the n-implant. The symmetric location of p-stop has the least Emax. The Emax increases as the strip pitch decreases less than 80 microns but stays the same as the pitch widens larger than 80 microns. The onset voltage of Punch-thru protection (PTP) is governed by the gap between the n-implants, N-N gap, even with the existence of p-stop in between.
Keywords
Design optimization; Implants; Large Hadron Collider; Microstrip; Nuclear and plasma sciences; P-n junctions; Robustness; Silicon; Strips; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Nuclear Science Symposium Conference Record, 2008. NSS '08. IEEE
Conference_Location
Dresden, Germany
ISSN
1095-7863
Print_ISBN
978-1-4244-2714-7
Electronic_ISBN
1095-7863
Type
conf
DOI
10.1109/NSSMIC.2008.4774864
Filename
4774864
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