Using the trajectory analysis for measuring nano-objects by the interference phase-shifting systems

Author

Guzhov, Vladimir Ivanovich ; Ilinykh, Sergey Petrovich ; Ilyin, Maxim Eduardovich

Author_Institution

Novosibirsk State Tech. Univ., Novosibirsk

fYear

2008

fDate

23-29 June 2008

Firstpage

193

Lastpage

194

Abstract

Therefore, the balance of random and systematic variations of brightness field in interferograms and calibration of phase shifts is required for practical realization of the extreme precision characteristics. Trajectory method of analysing the inteferogams is developed, it allows to avoid the influence of determined destabilizing factors and does not require a priori value of inserted phase shifts. The developed trajectory method of analysing the interferograms has no analog in Russia and abroad and allows to increase the exactness of interferential measurements considerably to lambda/10000 and more.

Keywords

brightness; light interference; nanotechnology; phase shifting interferometry; destabilizing factors; interference phase-shifting systems; interferential measurements; nanoobject measurement; phase shifts; trajectory analysis; Adaptive optics; Brightness; Distortion measurement; Interference; Measurement errors; Optical distortion; Optical filters; Optical interferometry; Phase measurement; Signal analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Strategic Technologies, 2008. IFOST 2008. Third International Forum on

Conference_Location

Novosibirsk-Tomsk

Print_ISBN

978-1-4244-2319-4

Electronic_ISBN

978-1-4244-2320-0

Type

conf

DOI

10.1109/IFOST.2008.4603022

Filename

4603022