Polymeric micromachines driven by laser-induced negative dielectrophoresis

Optoelectronic micromachines driven by laser-induced dielectrophoretic force were developed by two-photon microfabrication. The optoelectronic driving system consists of the lower photoconductive layer of amorphous silicon on an indium tin oxide (ITO)-coated glass substrate and the upper transparent, conductive ITO-coated glass substrate. Micromachines are fabricated on the upper ITO-coated substrate by two-photon microfabrication. To estimate the driving condition, we examined the displacement of a microparticle by focusing a laser beam. Micromachines such as manipulators and microgears were also driven at proper driving condition. Furthermore a prototype of microfluidic components was developed. The optoelectronic micromachines will be powerful tools applicable to high-performance, low-cost lab-on-a-chip devices.