Closed-loop identification of a micro-sensor

This paper reports a method for obtaining rapid, precision estimates of the dynamics of the JPL MEMS vibratory rate sensor. Accurate identification of the two nearly degenerate lightly damped modes (Q ≈ 50000) which are coupled via a Coriolis term, and hence render the sensor sensitive to rotation, is necessary for device calibration and design of the control loops that are employed in such sensors. Another compelling reason for obtaining the best possible model of the sensor is to use this knowledge to modify the sensor dynamics to a more favorable condition by performing a tuning step in the final stages of manufacturing.