Control of the nanopositioning devices

We present a paradigm which prescribes a procedure for a systematic design, analysis and development of nanopositioning devices. In this effort, we have used many tools from modern control theory to model devices, to quantify device resolution, bandwidth, range, and robustness, and to tackle undesirable nonlinear effects such as hysteresis and creep. The implementation of this procedure for the simultaneous achievement of robustness, high precision, and high bandwidth objectives is presented. Emphasis is placed on the robustness aspects that make the nanopositioner operable in diverse need for tuning that is present paradigm are demonstrated operating conditions thus alleviating the need for tuning that is present in existing designs. The merits of the through experimental results.