Projection Clutching System for Force Transmission System based on Tulip-shaped Electrostatic Clutch

We have previously proposed an arrayed vertical motion system based on a tulip-shaped electrostatic clutch for producing haptic displays. The system has an advantage in that it is able to individually operate arrayed minute projection with high-power and large strokes (Output: 600 mN and displacement: 60 mum). This time, we added a new electrostatic latch mechanism to the system to individually control the projection state. We used MEMS technologies to fabricate a 4x4 array electrostatic latch mechanism. The total size of the mechanism was 6.0 x 6.0 x 0.5 mm. We evaluated the relationship between the applied voltage and a holding force of a few mN was obtained for the spring device.