DocumentCode
2635168
Title
Enhanced infrared responsivity of helium implanted SOI waveguides
Author
Liu, Y. ; Chow, C.W. ; Cheung, W.Y. ; Tsang, H.K.
Author_Institution
Dept. of Electron. Eng., Chinese Univ. of Hong Kong, Shatin
fYear
2005
fDate
22-22 Oct. 2005
Firstpage
614
Lastpage
615
Abstract
We study the infrared photoresponse of silicon waveguides which were implanted with helium ions. The observed enhancement in responsivity at 1.55 mum wavelength was sufficient for use in in-line channel power monitoring applications
Keywords
infrared detectors; ion implantation; optical waveguides; photodetectors; silicon-on-insulator; 1.55 mum; SOI waveguides; helium implantation; infrared responsivity; inline channel power monitoring; Helium; Monitoring; Optical coupling; Optical device fabrication; Optical waveguides; Particle beam optics; Photoconductivity; Photonic band gap; Programmable control; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Conference_Location
Sydney, NSW
Print_ISBN
0-7803-9217-5
Type
conf
DOI
10.1109/LEOS.2005.1548147
Filename
1548147
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