DocumentCode
2636445
Title
Reliable threshold voltage determination for sub-0.1 μm gate length MOSFETs
Author
Tsuno, M. ; Suga, M. ; Tanaka, M. ; Shibahara, K. ; Miura-Mattausch, M. ; Hirose, M.
Author_Institution
Res. Center for Nanodevices & Syst., Hiroshima Univ., Japan
fYear
1998
fDate
10-13 Feb 1998
Firstpage
111
Lastpage
116
Abstract
A reliable method to determine the threshold voltage Vth for MOSFETs with gate length down to sub-0.1 μm has been developed. The method determines Vth by linear extrapolation of the transconductance gm to zero and is therefore named “GMLE method”. 2D simulations were performed to extract the physical meaning of the method and to prove its reliability for different technologies. The results reveal that determined Vth values always meet the threshold condition, i.e. the onset of inversion layer build-up
Keywords
MOSFET; circuit CAD; circuit analysis computing; 2D simulations; MOSFETs; inversion layer build-up; linear extrapolation; reliability; threshold condition; threshold voltage; transconductance; Current measurement; Data mining; Extrapolation; Linearity; Low voltage; MOSFET circuits; Subthreshold current; Threshold voltage; Transconductance;
fLanguage
English
Publisher
ieee
Conference_Titel
Design Automation Conference 1998. Proceedings of the ASP-DAC '98. Asia and South Pacific
Conference_Location
Yokohama
Print_ISBN
0-7803-4425-1
Type
conf
DOI
10.1109/ASPDAC.1998.669419
Filename
669419
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