• DocumentCode
    2636445
  • Title

    Reliable threshold voltage determination for sub-0.1 μm gate length MOSFETs

  • Author

    Tsuno, M. ; Suga, M. ; Tanaka, M. ; Shibahara, K. ; Miura-Mattausch, M. ; Hirose, M.

  • Author_Institution
    Res. Center for Nanodevices & Syst., Hiroshima Univ., Japan
  • fYear
    1998
  • fDate
    10-13 Feb 1998
  • Firstpage
    111
  • Lastpage
    116
  • Abstract
    A reliable method to determine the threshold voltage Vth for MOSFETs with gate length down to sub-0.1 μm has been developed. The method determines Vth by linear extrapolation of the transconductance gm to zero and is therefore named “GMLE method”. 2D simulations were performed to extract the physical meaning of the method and to prove its reliability for different technologies. The results reveal that determined Vth values always meet the threshold condition, i.e. the onset of inversion layer build-up
  • Keywords
    MOSFET; circuit CAD; circuit analysis computing; 2D simulations; MOSFETs; inversion layer build-up; linear extrapolation; reliability; threshold condition; threshold voltage; transconductance; Current measurement; Data mining; Extrapolation; Linearity; Low voltage; MOSFET circuits; Subthreshold current; Threshold voltage; Transconductance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design Automation Conference 1998. Proceedings of the ASP-DAC '98. Asia and South Pacific
  • Conference_Location
    Yokohama
  • Print_ISBN
    0-7803-4425-1
  • Type

    conf

  • DOI
    10.1109/ASPDAC.1998.669419
  • Filename
    669419