Parameter extraction of resistive thermal microsensors by AC electrical method

Author

Ou-Yang, Mang ; Sheen, Chin-Shown ; Shie, Jin-Shown

Author_Institution

Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan

Volume

2

fYear

1997

fDate

19-21 May 1997

Firstpage

893

Abstract

Device parameters of thermal microsensors are essential for evaluating the sensor performances and their simulation modeling. We report an AC electrical method for extracting these parameters experimentally with relatively simple instrumentation. The basic parameters of resistive microsensors, the resistance, temperature coefficient of resistance, thermal capacitance and conductance, are derivable from the second harmonic signal of the output voltage induced by a sinusoidal driving current. The results obtained are compared with other methods

Keywords

bolometers; characteristics measurement; electric resistance measurement; harmonic analysis; microsensors; resistance thermometers; semiconductor device models; temperature sensors; thermal resistance; AC electrical method; microbolometer; output voltage; parameter extraction; relatively simple instrumentation; resistance parameters; resistive thermal microsensors; second harmonic signal; sensor performance; simulation modeling; sinusoidal driving current; temperature coefficient of resistance; thermal capacitance; thermal conductance; Capacitance; Electric resistance; Instruments; Microsensors; Parameter extraction; Performance evaluation; Temperature sensors; Thermal conductivity; Thermal resistance; Thermal sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 1997. IMTC/97. Proceedings. Sensing, Processing, Networking., IEEE

Conference_Location

Ottawa, Ont.

ISSN

1091-5281

Print_ISBN

0-7803-3747-6

Type

conf

DOI

10.1109/IMTC.1997.610253

Filename

610253