• DocumentCode
    2643652
  • Title

    Modelling and active vibration control of a turbomolecular vacuum pump

  • Author

    Piroddi, Luigi ; Leva, Alberto ; Casaro, Fausto

  • Author_Institution
    Dipartimento di Elettronica e Informazione, Politecnico di Milano, via Ponzio 34/5, 20133, Italy
  • fYear
    2006
  • fDate
    4-6 Oct. 2006
  • Firstpage
    1103
  • Lastpage
    1108
  • Abstract
    This manuscript presents an experimental activity aimed at modeling a turbo-molecular vacuum pump, and designing an active vibration control system. After describing the experimental setup, a data-based frequency domain model of the pump is illustrated. Some possible control design strategies for broadband and/or narrowband vibration reduction are then discussed. Simulations and (preliminary) experimental results are reported, to evaluate and compare the proposed control design solutions.
  • Keywords
    Accelerometers; Control design; Damping; Flanges; Frequency estimation; Piezoelectric actuators; Shock absorbers; Vacuum systems; Vacuum technology; Vibration control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Computer Aided Control System Design, 2006 IEEE International Conference on Control Applications, 2006 IEEE International Symposium on Intelligent Control, 2006 IEEE
  • Conference_Location
    Munich, Germany
  • Print_ISBN
    0-7803-9797-5
  • Electronic_ISBN
    0-7803-9797-5
  • Type

    conf

  • DOI
    10.1109/CACSD-CCA-ISIC.2006.4776798
  • Filename
    4776798