DocumentCode
2644152
Title
Effect of grounding arrangement on PZT thin film capacitor
Author
Sulaiman, Suhana ; Lazim, Nor ; Bakar, Raudah ; Awang, Zaiki ; Dollah, Asban
Author_Institution
Microwave Technol. Center, Univ. Teknol. MARA, Shah Alam
fYear
2007
fDate
4-6 Dec. 2007
Firstpage
1
Lastpage
4
Abstract
This paper reports on a new investigation carried out on the grounding arrangement of monolithic microwave integrated circuit (MMIC) thin film capacitors to improve their high frequency behavior. Via holes have been etched on the PZT to create the ground contact. The measurement shows an improvement in the capacitor response compared to direct contact to the exposed Pt area at the film edge.
Keywords
MMIC; earthing; ferroelectric capacitors; lead compounds; thin film capacitors; MMIC; PZT thin film capacitor; grounding arrangement effect; monolithic microwave integrated circuit thin film capacitors; Area measurement; Capacitors; Etching; Frequency; Grounding; MMICs; Microwave integrated circuits; Monolithic integrated circuits; Thin film circuits; Transistors; MMIC capacitors; thin film; via hole;
fLanguage
English
Publisher
ieee
Conference_Titel
Applied Electromagnetics, 2007. APACE 2007. Asia-Pacific Conference on
Conference_Location
Melaka
Print_ISBN
978-1-4244-1434-5
Electronic_ISBN
978-1-4244-1435-2
Type
conf
DOI
10.1109/APACE.2007.4603975
Filename
4603975
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