DocumentCode
2645564
Title
Time resolved eedf investigation for plasma heating
Author
You, S.J. ; Kim, S.S. ; Ahn, S.K. ; Chang, H.Y.
Author_Institution
Dept. of Phys., Korea Adv. Inst. of Sci. & Technol., Daejeon
fYear
2006
fDate
4-8 June 2006
Firstpage
95
Lastpage
95
Abstract
Summary form only given. Time resolved measurements of EEDF (electron energy distribution function) at various pressure ranges reveal that there are two distinct heating mechanisms as mentioned in previous studies. According to gas pressure, the processes to make high energy electrons which make ionization to sustain the plasma are clearly different. Theoretical calculation based on the non-local kinetics is in a good agreement with experiments
Keywords
ionisation; plasma diagnostics; plasma heating; plasma kinetic theory; plasma pressure; electron energy distribution function; gas pressure; ionization; nonlocal kinetic calculation; plasma heating; time resolved measurements; Distribution functions; Electrons; Energy measurement; Energy resolution; Heating; Ionization; Kinetic theory; Plasma measurements; Pressure measurement; Time measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. The 33rd IEEE International Conference on
Conference_Location
Traverse City, MI
Print_ISBN
1-4244-0125-9
Type
conf
DOI
10.1109/PLASMA.2006.1706967
Filename
1706967
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