• DocumentCode
    2647877
  • Title

    Epitaxial Liftoff Technology For OEIC´s

  • Author

    Yablonovitch, E.

  • Author_Institution
    Navesink Research Center
  • fYear
    1991
  • fDate
    29 Jul-2 Aug 1991
  • Firstpage
    5
  • Lastpage
    6
  • Keywords
    Crystalline materials; Gallium arsenide; Glass; Optical materials; Optical waveguides; Optoelectronic devices; Semiconductor materials; Semiconductor thin films; Silicon; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
  • Print_ISBN
    0-87942-618-7
  • Type

    conf

  • DOI
    10.1109/LEOSST.1991.638984
  • Filename
    638984