DocumentCode
2647877
Title
Epitaxial Liftoff Technology For OEIC´s
Author
Yablonovitch, E.
Author_Institution
Navesink Research Center
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
5
Lastpage
6
Keywords
Crystalline materials; Gallium arsenide; Glass; Optical materials; Optical waveguides; Optoelectronic devices; Semiconductor materials; Semiconductor thin films; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.638984
Filename
638984
Link To Document