DocumentCode
2647929
Title
Reflectivity Measurements Of Electron Beam Written First Order Bragg Gratings On AlGaAs Rib Waveguides
Author
Vasey, F. ; Ganière, J.D. ; Reinhart, F.K. ; Stauffer, J.M.
Author_Institution
EPFL, Swiss Federal Institute of Technology
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
10
Lastpage
11
Keywords
Bragg gratings; Electron beams; Mirrors; Optical coupling; Optical filters; Optical waveguides; Particle beams; Reflectivity; Resists; Writing;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.638987
Filename
638987
Link To Document