DocumentCode
2650953
Title
Characterization Of Dry Etch Induced In Ill/V Micro-structures
Author
Germann, R.
Author_Institution
IBM Research Division, Zurich Research Laboratory
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
33
Lastpage
34
Keywords
Argon; Dry etching; Geometrical optics; Ion beams; Surface emitting lasers; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.639005
Filename
639005
Link To Document