DocumentCode
2655947
Title
Nano-scale imaging with a compact EUV laser
Author
Vaschenko, G. ; Brizuela, F. ; Brewer, C. ; Grisham, M. ; Mancini, H. ; Menoni, C.S. ; Marconi, M. ; Rocca, J.J. ; Chao, W. ; Liddle, A. ; Anderson, E. ; Attwood, D. ; Vinogradov, A.V. ; Artioukov, I.A. ; Pershyn, Yu.P. ; Kondratenko, V.V.
Author_Institution
Dept. of Electr. & Comput. Eng., Colorado State Univ., Fort Collins, CO, USA
Volume
3
fYear
2005
fDate
22-27 May 2005
Firstpage
1953
Abstract
We report sub-140 nm resolution imaging with 46.9 nm radiation from a compact capillary-discharge laser. This result was obtained using a combination of a Sc/Si multilayer-coated Schwarzschild condenser and free-standing imaging zone plate.
Keywords
X-ray imaging; X-ray lasers; ion lasers; isoelectronic series; nanotechnology; optical multilayers; scandium; silicon; zone plates; 140 nm; Sc-Si; Sc-Si multilayer-coated Schwarzschild condenser; compact EUV laser; compact capillary-discharge laser; free-standing imaging zone plate; nanoscale imaging; High-resolution imaging; Image resolution; Laser beams; Laser modes; Optical imaging; Optical reflection; Spatial resolution; Ultraviolet sources; X-ray imaging; X-ray lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics and Laser Science Conference, 2005. QELS '05
Print_ISBN
1-55752-796-2
Type
conf
DOI
10.1109/QELS.2005.1549339
Filename
1549339
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