DocumentCode
2656106
Title
Etching And OMVPE Regrowth For GalnAs/lnP Quantum Wires
Author
Miyamoto, Y. ; Arai, S. ; Asada, M.
Author_Institution
Tokyo Institute of Technology, Tokyo, Japan
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
81
Lastpage
81
Keywords
Etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.639030
Filename
639030
Link To Document