Performances of suspended Silicon Nanowire Resonators for time reference applications

Author

Koumela, Alexandra ; Mercier, Denis ; Marcoux, Carine ; Duraffourg, Laurent ; Purcell, Stephen T.

Author_Institution

CEA-LETI, Grenoble, France

fYear

2012

fDate

21-24 May 2012

Firstpage

1

Lastpage

4

Abstract

High frequency Silicon NanoWire Resonators (SNWR) have been fabricated and their performances for time reference applications have been assessed. The SNWR have been designed to operate at different frequencies going from 55 MHz up to 300 MHz with quality factors higher than 2000 at room temperature under high vacuum. The measured temperature coefficient of frequency (TCF) for different SNWR is about 40 ppm over a range of temperature going from 4 K to 300 K. The evolution of the quality factor as function of temperature has also been measured as well as the Allan deviation for different nanowire lengths.

Keywords

Q-factor; elemental semiconductors; micromechanical resonators; nanofabrication; nanosensors; nanowires; silicon; Allan deviation; Si; TCF; frequency 55 MHz to 300 MHz; high-frequency SNWR; high-frequency silicon nanowire resonators; quality factor; suspended silicon nanowire resonators; temperature 293 K to 298 K; temperature 4 K to 300 K; temperature coefficient of frequency; time reference applications; Frequency measurement; Q factor; Resonant frequency; Silicon; Temperature distribution; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium (FCS), 2012 IEEE International

Conference_Location

Baltimore, MD

ISSN

1075-6787

Print_ISBN

978-1-4577-1821-2

Type

conf

DOI

10.1109/FCS.2012.6243597

Filename

6243597