• DocumentCode
    2658613
  • Title

    Optical actuation and detection of MEMS resonators: Behavioral modeling and phase noise simulations

  • Author

    Papin, G. ; Levy, R. ; Bosseboeuf, A. ; Fabbri, F. ; Parrain, F. ; Malak, M. ; Bourouina, T. ; Lissorgues, G. ; Poulichet, P.

  • Author_Institution
    DMPH, ONERA, Chatillon, France
  • fYear
    2012
  • fDate
    21-24 May 2012
  • Firstpage
    1
  • Lastpage
    5
  • Abstract
    Optical actuation and detection of MEMS resonators can improve the resolution of their motion detection compared to standard detection techniques (capacitive, piezoelectric). In this paper, a behavioral model of MEMS resonator with optical actuation and detection and the associated oscillator circuit are presented and used to determine its performances.
  • Keywords
    micromechanical resonators; oscillators; MEMS resonators; associated oscillator circuit; behavioral modeling; motion detection; optical actuation; optical detection; phase noise simulations; Integrated circuit modeling; Laser beams; Noise; Optical interferometry; Optical resonators; Optical sensors; Oscillators;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium (FCS), 2012 IEEE International
  • Conference_Location
    Baltimore, MD
  • ISSN
    1075-6787
  • Print_ISBN
    978-1-4577-1821-2
  • Type

    conf

  • DOI
    10.1109/FCS.2012.6243656
  • Filename
    6243656
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2658613