GHz aluminum nitride optomechanical wheel resonators

Author

Xiong, Chi ; Sun, Xiankai ; Fong, King Y. ; Tang, Hong X.

Author_Institution

Dept. of Electr. Eng., Yale Univ. New Haven, New Haven, CT, USA

fYear

2012

fDate

21-24 May 2012

Firstpage

1

Lastpage

4

Abstract

Aluminum nitride (AlN) has been widely used in microeletromechanical resonators for its excellent electromechanical properties. Here we demonstrate the use of AlN as an optomechanical material that simultaneously offers low optical and mechanical loss. Integrated AlN microring resonators in the shape of suspended rings exhibit high optical quality factor (Q) with loaded Q up to 125,000. Optomechanical transduction of the Brownian motion of a GHz contour mode yields a displacement sensitivity of 6.3×10^-18 m/√Hz in ambient air.

Keywords

Brownian motion; III-V semiconductors; Q-factor; aluminium compounds; integrated optics; micro-optomechanical devices; micromechanical resonators; optical losses; optical resonators; wide band gap semiconductors; AlN; Brownian motion; GHz aluminum nitride optomechanical wheel resonators; GHz contour mode; Q factor; ambient air; displacement sensitivity; electromechanical properties; integrated microring resonators; low optical loss; mechanical loss; microeletromechanical resonators; optical quality factor; optomechanical material; optomechanical transduction; suspended rings; Couplings; Optical device fabrication; Optical filters; Optical ring resonators; Optical sensors; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium (FCS), 2012 IEEE International

Conference_Location

Baltimore, MD

ISSN

1075-6787

Print_ISBN

978-1-4577-1821-2

Type

conf

DOI

10.1109/FCS.2012.6243664

Filename

6243664