Effects of two-step deposition and thermal treatment on the frequency response characteristics of ZnO SAW devices

Author

Lee, Jin-Bock ; Lee, Hye-Jung ; Park, Jin-Seok

Author_Institution

Dept. of Electr. Eng., Hanyang Univ., Ansan, South Korea

fYear

2003

fDate

4-8 May 2003

Firstpage

868

Lastpage

873

Abstract

Polycrystalline ZnO thin films are deposited on SiO₂/Si(100) substrate using RF magnetron sputtering. The film deposition performed in this research is composed of the following two procedures; 1^st-deposition for 30 min without oxygen at 100 W and 2^nd-deposition with oxygen in the range O₂/(Ar+O₂)=10∼50%. Deposited ZnO films reveal a strongly c-axis preferred-orientation (the corresponding texture coefficient ∼100%) as well as a high resistivity (>10⁷Ωcm). It is also observed that the crystallite size of ZnO is noticeably increased by thermal-annealing. In addition, surface acoustic wave (SAW) devices are also fabricated by using a lift-off method, with the configuration of IDT/ZnO/SiO₂/Si(100). Frequency response characteristics (including S₂₁) of fabricated SAW devices are measured and device parameters including insertion losses and side-lobe rejection level estimated from frequency response are compared.

Keywords

II-VI semiconductors; annealing; crystallites; electrical resistivity; frequency response; semiconductor growth; semiconductor thin films; sputter deposition; surface acoustic wave devices; texture; zinc compounds; 100 W; 30 min; RF magnetron sputtering; SiO₂-Si; SiO₂-Si(100) substrate; ZnO; ZnO SAW device; ZnO surface acoustic wave device; crystallite size; frequency response properties; insertion loss; lift-off method; polycrystalline ZnO thin film; preferred orientation; resistivity; side lobe rejection level; texture; thermal annealing; thermal treatment; Acoustic waves; Conductivity; Crystallization; Frequency response; Radio frequency; Sputtering; Substrates; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003 IEEE International

ISSN

1075-6787

Print_ISBN

0-7803-7688-9

Type

conf

DOI

10.1109/FREQ.2003.1275204

Filename

1275204