Toward smart micromachines with integrated feedback control

This paper reports the design, fabrication, and characterization of an electrostatic micromotor with an integrated photodiode-based closed loop control system. Feedback control enables the synchronization of electrical excitation and mechanical motion, resulting in stable motor operation. This approach allows the realization of smart micromotors and micropositioners capable of providing position control, increased speed and continuous motion. Furthermore, it enables adaptive control of Power MEMS devices such as micropumps and microgenerators that require stable, efficient, and reliable operation.