DocumentCode
2660590
Title
Low frequency noise measurement of three-axis surface micro- machined silicon capacitive accelerometer
Author
Mohd-Yasin, F. ; Nagel, D.J. ; Korman, C.E. ; Ong, D.S. ; Chuah, H.T.
Author_Institution
Multimedia Univ., Cyberjaya
fYear
2007
fDate
12-14 Dec. 2007
Firstpage
1
Lastpage
2
Abstract
The authors performed the low frequency noise measurement (LFNM) technique to study noise characteristics of commercial accelerometers with single and dual axis. In this work, we studied the noise characteristics of a three-axis accelerometer using an improved and sensitive test setup to avoid cross-axis distortion.
Keywords
accelerometers; capacitive sensors; electric noise measurement; micromachining; microsensors; silicon; LFNM technique; low frequency noise measurement technique; microsensors; surface micromachined silicon capacitive accelerometer; three-axis accelerometer; Acceleration; Accelerometers; Acoustic noise; Circuit noise; Frequency measurement; Low-frequency noise; Micromechanical devices; Noise figure; Noise measurement; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium, 2007 International
Conference_Location
College Park, MD
Print_ISBN
978-1-4244-1891-6
Electronic_ISBN
978-1-4244-1892-3
Type
conf
DOI
10.1109/ISDRS.2007.4422474
Filename
4422474
Link To Document