DocumentCode
2660812
Title
A discussion on the likely mechanisms for dielectric charging in AFM
Author
Makasheva, Kremena ; Despax, Bernard ; Boudou, Laurent ; Laurent, Christian ; Teyssedre, Gilbert
Author_Institution
LAPLACE (Lab. Plasma et Conversion d´´Energie), Univ. de Toulouse, Toulouse, France
fYear
2010
fDate
17-20 Oct. 2010
Firstpage
1
Lastpage
4
Abstract
Charge distribution estimation at the surface and in the bulk of dielectrics is of great interest, both theoretically and experimentally, not only because it brings information on the storage and transport properties of the medium, but also because of various possible applications of thin dielectric layers e.g. in the field of miniaturized components. Scaling down the dimensions of these components to nanoscale level creates difficulties with the application of the commonly used diagnostic methods. With a resolution in the nanometer range, the atomic force microscopy (AFM) can be used to this field. By applying a voltage between the microscope tip and a sample, both conducting and insulating surfaces can be imaged. The AFM can be applied for charging of samples in contact mode or when a tip-to-sample spacing is introduced. The purpose of this work is to discuss about appropriate mechanisms for dielectric charging in AFM that are still controversial in the literature.
Keywords
atomic force microscopy; charge measurement; dielectric materials; surface charging; AFM; atomic force microscopy; charge distribution estimation; diagnostic methods; dielectric charging; dielectric layers; microscope tip; miniaturized components; nanoscale level; storage properties; tip-to-sample spacing; transport properties; Current density; Dielectrics; Discharges; Electric fields; Electron emission; Force; Microscopy; AFM; charging mechanisms; dielectrics;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Insulation and Dielectric Phenomena (CEIDP), 2010 Annual Report Conference on
Conference_Location
West Lafayette, IN
ISSN
0084-9162
Print_ISBN
978-1-4244-9468-2
Type
conf
DOI
10.1109/CEIDP.2010.5724090
Filename
5724090
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