Reliable Process Monitoring Through Tool Optimization Leads to Yield Improvement

Hard drive manufacturers need a consistent and reliable monitoring process to ensure product quality at all stages in the manufacturing process. This paper discusses the problems associated with inspection tool matching and the related solutions used to accurately measure defects and other metrics at any part of the process. A systematic approach to solving tool matching issues involves adjustment of the hardware as well as the optimization of the software used for defect inspection. Correlation of tools and process monitoring equipment is a major factor in yield management