Subwavelength Optical Elements and Nanoimprint Technology for Optical MEMS/NMES

This paper presents examples in SOEs and NIL. It shows how to change the optical function of SOEs by changing the geometries of the sub-wavelength feature, while keeping the materials the same (e.g. Si): changing from waveplates to filters (e.g. photonic crystals), antireflection surfaces, polarizers, beam splitters, and to lenses. It also shows that each of the above functions has been achieved with a layer thickness less than one micron. This paper presents examples on the SOE integration of themselves or with other optical devices to achieve unique or better function and/or performances. The examples include a new compact circular polarizer that combines a SOE quarter-waveplate and a SOE polarizer, a single mode laser with its mode locked by a SOE filter (photonic crystal), the lasers with tunable frequencies or polarizations; a very high-frequency optical clock, and all optical switching