DocumentCode
2662885
Title
One Megapixel SLM with High Optical Fill Factor and Low Creep Actuators
Author
Friedrichs, Martin ; Schmidt, Jan ; Duerr, Peter ; Bakke, Thor
Author_Institution
Fraunhofer-Inst. for Photonic Microsyst., Dresden
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
23
Lastpage
24
Abstract
A one megapixel micromirror based SLM with two layer torsional mirror actuators was monolithically integrated on CMOS. The mirrors have a high optical fill factor and a very low level of mechanical creep when actuated
Keywords
CMOS integrated circuits; integrated optics; integrated optoelectronics; micro-optomechanical devices; microactuators; micromirrors; monolithic integrated circuits; spatial light modulators; CMOS; mechanical creep actuators; megapixel SLM; micromirror; monolithically integration; optical fill factor; torsional mirror actuators; Actuators; Aluminum alloys; Creep; Electrodes; Micromirrors; Mirrors; Optical materials; Optical modulation; Polymers; Springs;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708246
Filename
1708246
Link To Document