A Combination of Fast Resonant Mode and Slow Static Deflection of SOI-PZT Actuators for MEMS Image Projection Display

Author

Tani, Masanao ; Akamatsu, Masahiro ; Yasuda, Yoshiaki ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi

Author_Institution

R&D Center, Stanley Electr. Co. Ltd., Kanagawa

fYear

2006

fDate

21-24 Aug. 2006

Firstpage

25

Lastpage

26

Abstract

A new type of MEMS optical scanner for image projection display has been developed by using the ADRIP (arc discharge reactive ion plating) technique of PZT piezoelectric material on an SOI wafer. Stable and wide range 2D scan was made possible by combining resonant motion for the fast horizontal axis (11.2 kHz, optical 39 degrees) and quasi-static operation for the slow vertical axis (DC ~60 Hz, optical 29 degrees) operated at 40 Vpp voltage

Keywords

arcs (electric); image scanners; ion plating; micro-optomechanical devices; microdisplays; optical projectors; optical scanners; piezoelectric actuators; silicon-on-insulator; sputter etching; 11.2 kHz; MEMS optical scanner; PZT piezoelectric material; SOI wafer; SOI-PZT actuators; arc discharge reactive ion plating technique; fast resonant mode; image projection display; quasistatic operation; slow static deflection; Arc discharges; Displays; Electrodes; Micromechanical devices; Mirrors; Particle beam optics; Piezoelectric actuators; Resonance; Stimulated emission; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on

Conference_Location

Big Sky, MT

Print_ISBN

0-7803-9562-X

Type

conf

DOI

10.1109/OMEMS.2006.1708247

Filename

1708247