• DocumentCode
    2663625
  • Title

    Rotary Comb Drive Actuator with an Optical Fiber Encoder

  • Author

    Nagao, Shinya ; Oohira, Fumikazu ; Hosogi, Maho ; Hashiguchi, Gen

  • Author_Institution
    Dept. of Intelligent Mech. Syst. Eng., Kagawa Univ., Takamatsu
  • fYear
    2006
  • fDate
    21-24 Aug. 2006
  • Firstpage
    98
  • Lastpage
    99
  • Abstract
    We propose the rotary type electrostatic comb drive actuator with a sensor scale for an optical fiber encoder. This actuator can be expected to measure the amount of the movement of the actuator precisely by using the optical fiber encoder
  • Keywords
    electrostatic actuators; encoding; micro-optomechanical devices; optical fibres; electrostatic comb drive actuator; optical fiber encoder; Electrostatic actuators; Electrostatic measurements; Etching; Intelligent actuators; Optical detectors; Optical fiber sensors; Optical fibers; Optical sensors; Pneumatic actuators; Resists;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
  • Conference_Location
    Big Sky, MT
  • Print_ISBN
    0-7803-9562-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2006.1708283
  • Filename
    1708283
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2663625