DocumentCode
2663964
Title
Individually Tunable Silicon Bragg Reflectors
Author
Koné, Fatou Binetou ; Peter, Yves-Alain
Author_Institution
Ecole Polytech. de Montreal, Que.
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
136
Lastpage
137
Abstract
We introduce an innovative design of a tunable optical filter. The design constitutes of a vertical Bragg grating microfabricated in the device layer of a silicon-on-insulator (SOI) wafer and whose silicon walls can be independently operated to select the desired response of the filter. The design concept and detailed microfabrication process are presented
Keywords
Bragg gratings; distributed Bragg reflectors; micro-optics; optical design techniques; optical fabrication; optical filters; optical tuning; silicon-on-insulator; microfabrication process; silicon walls; silicon-on-insulator wafer; tunable optical filter; tunable silicon Bragg reflectors; vertical Bragg gratings; Etching; Laser tuning; Lithography; Mirrors; Optical design; Optical fiber devices; Optical fibers; Optical filters; Silicon; Tunable circuits and devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708302
Filename
1708302
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