DocumentCode
2663976
Title
Characterization of Silicon Nitride Micromachined Beams via Remote Optical Interrogation
Author
Shelton, W. Andrew ; Muth, John F. ; Holland, Jonathan L. ; Lunardi, Leda M.
Author_Institution
Dept. of Electr. & Comput. Eng., North Carolina State Univ., Raleigh, NC
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
138
Lastpage
139
Abstract
We demonstrate that mechanical characterization of the motion of micromachined double- clamped silicon nitride beams is possible via remote optical interrogation. Using Fabry-Perot interferometry, information about the absolute displacement and resonant frequency of various mechanical modes is determined
Keywords
Fabry-Perot interferometers; laser cavity resonators; measurement by laser beam; micro-optics; micromachining; micromechanical devices; silicon compounds; Fabry-Perot interferometry; SiN; absolute displacement; mechanical mode characterization; micromachined double-clamped silicon nitride beams; remote optical interrogation; resonant frequency; Fabry-Perot; Laser beams; Laser tuning; Microcavities; Optical beams; Optical films; Optical interferometry; Optical sensors; Optical signal processing; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708303
Filename
1708303
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