DocumentCode
2664084
Title
Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics
Author
Il Woong Jung ; Peter, Yves-Alain ; Carr, Emily ; Jen-Shiang Wang ; Solgaard, Olav
Author_Institution
Dept. of Electr. Eng., Stanford Univ., CA
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
152
Lastpage
153
Abstract
We present a single-crystal-silicon (SCS) continuous membrane deformable minor array with applications as a corrective adaptive optics element for space-based telescopes. The continuous membrane is made from a thin silicon-on-insulator (SOI) layer with good optical surface quality. The membrane is able to deform locally by 125 nm at 100 V with a resonance frequency of 25 kHz
Keywords
adaptive optics; membranes; micromechanical devices; micromirrors; optical arrays; optical fabrication; silicon-on-insulator; space research; telescopes; 100 V; 125 nm; 25 kHz; Si; adaptive optics; deformable mirror array; optical surface quality; resonance frequency; single-crystal-silicon continuous membrane MEMS; space-based telescopes; thin silicon-on-insulator layer; Adaptive arrays; Adaptive optics; Biomembranes; Electrodes; Fabrication; Micromechanical devices; Mirrors; Optical arrays; Optical distortion; Springs;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708310
Filename
1708310
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