DocumentCode
2664243
Title
Multi-Probe SPM using Fringe Patterns for a Parallel Nano Imaging
Author
Koyama, H. ; Oohira, Fumikazu ; Hosogi, M. ; Hashiguchi, Gen
Author_Institution
Dept. of I.M.S.E., Kagawa Univ., Takamatsu
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
172
Lastpage
173
Abstract
This paper proposes a multi-probe SPM using fringe patterns which is able to measure the large area. The composition of the chip accumulates 50,000 probes in the area of 5 mmtimes5 mm. We fabricated the multi probes, and by using the chip the fringe patterns image could be taken with the CCD camera
Keywords
CCD image sensors; bioMEMS; biomedical optical imaging; nanotechnology; optical microscopy; scanning probe microscopy; 5 mm; CCD camera; MEMS technology; anode bonding technology; multi probes fabrication; multiprobe SPM; optical fringe patterns; parallel nano imaging; Area measurement; Biomedical measurements; Biomedical optical imaging; Charge coupled devices; Charge-coupled image sensors; Etching; Glass; Interference; Scanning probe microscopy; Semiconductor device measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708320
Filename
1708320
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