Parameterized MEMS device visualized modeling method-virtual assembly

Author

Lei, Wang ; Xin, Zhao ; Guizhang, Lu

Author_Institution

Inst. of Robot. & Autom. Inf. Syst., Nankai Univ., Tianjin

fYear

2008

fDate

16-18 July 2008

Firstpage

351

Lastpage

354

Abstract

In the area of MEMS design, modeling and simulation of MEMS device are always the most popular topics and are also very important in MEMS design process. Due to the 3D microstructure and mechanical characteristic of MEMS device, the paper proposes a visualized modeling method for MEMS with parameterized components-Virtual Assembly. Virtual Assembly not only contains 3D topology construction and assembly, but also contains dynamic model synthesis for modeling the dynamic model of whole device. By using parameterized components in a component library, Virtual Assembly could assemble the 3D topology and dynamic model of MEMS device. The parameterized component library is the foundation of Virtual Assembly. Together with the visualized mechanical simulation tool-Virtual Operation, it could implement more flexible and rapid modeling and simulation of MEMS.

Keywords

assembling; mechanical engineering computing; micromechanical devices; production engineering computing; virtual manufacturing; 3D topology construction; MEMS design process; component library; parameterized MEMS device; virtual assembly; virtual operation; visualized mechanical simulation tool; visualized modeling method; Assembly systems; Information systems; Integrated circuit modeling; Libraries; Microelectromechanical devices; Micromechanical devices; Robotic assembly; Robotics and automation; Topology; Visualization; MEMS; Parameterized model; Virtual assembly; Visualized modeling;

fLanguage

English

Publisher

ieee

Conference_Titel

Control Conference, 2008. CCC 2008. 27th Chinese

Conference_Location

Kunming

Print_ISBN

978-7-900719-70-6

Electronic_ISBN

978-7-900719-70-6

Type

conf

DOI

10.1109/CHICC.2008.4605566

Filename

4605566