Design optimization for low voltage DC contact RF MEMS shunt switch

Radio frequency switches are widely used in commercial, aerospace and defense applications. These include satellite communication systems, wireless communication and radar systems. In order to select an appropriate RF switch for any application, one must first consider the required performance specifications such as frequency bandwidth, power handling capability, signal level, switching speed, power consumption and tolerable losses. RF MEMS (micro-electro-mechanical-system) technology offers the necessary performance advantages over existing solid-state options. A design of DC contact RF MEMS shunt switch is proposed in this paper. The design is optimized in terms of activation mechanism which includes switch hinge thickness, bridge thickness, air gap height and number of menders. The pull-in voltage is analyzed with commercial CAD finite element analysis software IntelliSuite.