• DocumentCode
    2671149
  • Title

    Characterization of a planar RF induction plasma source for polymer film deposition processes

  • Author

    Mahoney, L.J. ; Shohet, J.L. ; Wendt, A.E.

  • Author_Institution
    University of Wisconsin
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    177
  • Lastpage
    177
  • Keywords
    Fault location; Fluctuations; Plasma applications; Plasma materials processing; Plasma measurements; Plasma properties; Plasma sources; Plasma temperature; Polymer films; Radio frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.698001
  • Filename
    698001
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2671149