• DocumentCode
    2671168
  • Title

    Effect Of Collisions On Ion Dynamics In The Downstream Region of an ECR Plasma Etching Experiment

  • Author

    Hussein, M.Z.B. ; Emmert ; Hershkowitz, Noah ; Woods, R.C.

  • Author_Institution
    University of Wisconsin
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    177
  • Lastpage
    177
  • Keywords
    Electrons; Etching; Plasma applications; Plasma materials processing; Plasma properties; Plasma simulation; Plasma sources; Plasma temperature; Polymer films; Radio frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.698002
  • Filename
    698002
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2671168