• DocumentCode
    2671187
  • Title

    Modeling Inductively Coupled Discharges For Plasma Processing

  • Author

    Mark J.Kushner ; Timothy J.Sommerer ; Seung J.Choi

  • Author_Institution
    University of Illinois
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    178
  • Lastpage
    178
  • Keywords
    Argon; Chemicals; Electrons; Inductors; Kinetic theory; Magnets; Monte Carlo methods; Plasma materials processing; Plasma temperature; Semiconductor device modeling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.698003
  • Filename
    698003
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2671187