Design and testing of dual-axial gyroscope

Gyroscopes are commonly used to measure the angular rate in various applications, such as the navigation, the stability control of cars, the camcorder image stabilization, the 3D pointing device, the virtual reality, and especially the aerospace dynamic control. Although recent advances in MEMS technology have demonstrated some designs and fabrications of micro gyroscopes, it´s still hard for MEMS gyros to get involved into the commercial market because of its high cost to achieve the necessary accuracy. Furthermore, multi-axial detection is required for many applications, while most MEMS gyros were designed for a single axis sensing. This paper presents a new beam-type gyroscope for the dual-axial rotation-rate detection with a single chip. It also takes the advantages of high performance, less-accurate facility consumption, high-yield rate potential as well as high compatibility with the existing MUMPs fabrication process