Characterization of the elastic properties of metrological quartz crystal resonators using acoustic force microscopy

Author

Sthal, Fabrice ; Bourquin, Roger

Author_Institution

LCEP-ENSMM, Besancon, France

fYear

2000

fDate

2000

Firstpage

174

Lastpage

176

Abstract

A new method of characterizing resonators is presented. This method is based on scanning acoustic force microscopy. Data on the topography and the vibration amplitude of the resonator are obtained at once, by means of atomic force interaction. The vibration amplitude of the resonator is quantified according to the normal of the surface of the resonator. A 10 MHz SC-cut BVA quartz crystal resonator with adherent electrodes are studied. This new analysis allows the mapping of the elastic properties of the resonator to be made

Keywords

acoustic microscopy; atomic force microscopy; calibration; crystal resonators; elasticity; surface acoustic waves; surface topography; vibrations; 10 MHz; AFM scanning; SC-cut BVA resonator; SiO₂; acoustic images; adherent electrodes; atomic force interaction; elastic properties; force calibration curve; metrological quartz crystal resonators; scanning acoustic force microscopy; topography; vibration amplitude; Acoustic devices; Acoustic measurements; Acoustic signal detection; Acoustic waves; Amplifiers; Atomic force microscopy; Probes; Surface acoustic wave devices; Surface acoustic waves; Surface topography;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International

Conference_Location

Kansas City, MO

ISSN

1075-6787

Print_ISBN

0-7803-5838-4

Type

conf

DOI

10.1109/FREQ.2000.887348

Filename

887348