• DocumentCode
    267866
  • Title

    ALD honeycomb plates enabling robust ultrathin MEMS

  • Author

    Davami, Keivan ; Lin Zhao ; Bargatin, Igor

  • Author_Institution
    Univ. of Pennsylvania, Philadelphia, PA, USA
  • fYear
    2014
  • fDate
    26-30 Jan. 2014
  • Firstpage
    449
  • Lastpage
    452
  • Abstract
    This paper reports rigid MEMS structures made of ALD films, which had thicknesses as low as 10 nanometers and were patterned in the shape of a 3D honeycomb. Hexagonal honeycomb lattices offer a dramatically higher flexural stiffness compared to that of planar films, allowing us to fabricate large-area suspended devices without significant warping. Both alumina (Al2O3) and silica (SiO2) structures were fabricated, each presenting a different set of fabrication challenges. The spring constants of the cantilever structures were measured and compared with the simulation results.
  • Keywords
    alumina; atomic layer deposition; honeycomb structures; micromechanical devices; silicon compounds; ALD honeycomb plates; Al2O3; SiO2; cantilever structures; flexural stiffness; hexagonal honeycomb lattices; rigid MEMS structures; robust ultrathin MEMS; Etching; Films; Micromechanical devices; Silicon; Silicon compounds; Springs; Three-dimensional displays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
  • Conference_Location
    San Francisco, CA
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2014.6765673
  • Filename
    6765673
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=267866